An insulating film having depressions and projections are formed on a substrate. A semiconductor film is formed on the insulating film. Thus, for crystallization by using laser light, a part where stress concentrates is selectively formed in the semiconductor film. More specifically, stripe or rectangular...http://www.google.de/patents/US20030230749?utm_source=gb-gplus-sharePatent US20030230749 - Semiconductor device and semiconductor device producing system