A process for making microswitches or microvalves, composed of a substrate and used for shifting between a first state of functioning and a second state of functioning by means of a bimetal-effect thermal sensor. The sensor includes a deformable element attached, at opposite ends, to the substrate so...http://www.google.de/patents/US7356913?utm_source=gb-gplus-sharePatent US7356913 - Process for manufacturing a microsystem
