A novel apparatus and technique or characterizing materials at submicron scale and for characterizing micromechanical devices integrates test specimens with the testing device. The test specimen is a micromechanical structure made of the material to be characterized or may be a device under...http://www.google.de/patents/US5786621?utm_source=gb-gplus-sharePatent US5786621 - Microelectromechanical integrated microloading device
