A probe card inspection system uses a fiduciary plate having a plurality of targets deposited thereon by photolithography and vapor deposition. A plurality of semiconductor probe card probe tips are contacted with the fiducial pattern on the plate. An electronic imaging system determines the position...http://www.google.de/patents/US6710798?utm_source=gb-gplus-sharePatent US6710798 - Methods and apparatus for determining the relative positions of probe tips on a printed circuit board probe card
