In a plasma reactor having an electrostatic chuck with an electrostatic chuck top surface for supporting a workpiece, thermal transfer medium flow channels in the interior of the electrostatic chuck, a method for controlling temperature of the workpiece during plasma processing includes circulating thermal...http://www.google.de/patents/US7988872?utm_source=gb-gplus-sharePatent US7988872 - Method of operating a capacitively coupled plasma reactor with dual temperature control loops
