In a substrate transfer apparatus, an adaptor unit 25 includes a box-shaped main body 40 having three open sides; and a plurality of stage arms 41 disposed in the main body 40, serving as substrate mounting members. Each of the stage arms 41 has a disc-shaped wafer supporting portion 411 disposed at...http://www.google.de/patents/US20070031222?utm_source=gb-gplus-sharePatent US20070031222 - Substrate transfer apparatus and method, and storage medium
