A microelectromechanical system (MEMS) analog isolator may be created in which an actuator such as an electrostatic motor drives a beam against an opposing force set, for example, by another electrostatic motor. Motion of the beam may be sensed by a sensor also attached to the beam. The beam itself is...http://www.google.de/patents/US6798312?utm_source=gb-gplus-sharePatent US6798312 - Microelectromechanical system (MEMS) analog electrical isolator
