An actuator operated microvalve and the method of making same is disclosed and claimed. The microvalve comprises a SiC housing which includes a first lower portion and a second upper portion. The lower portion of the SiC housing includes a passageway therethrough, a microvalve seat, and a moveable SiC...http://www.google.de/patents/US7438030?utm_source=gb-gplus-sharePatent US7438030 - Actuator operated microvalves
