A micromechanical switch is formed using a first sacrificial layer formed on a substrate. A second sacrificial layer is then formed as an island on the first sacrificial layer. A switch element layer of resilient material is then formed on the second sacrificial layer, and the outline of a switch element...http://www.google.de/patents/US5262000?utm_source=gb-gplus-sharePatent US5262000 - Method for making micromechanical switch
