An apparatus and methods of forming the apparatus include a film of transparent conductive titanium-doped indium oxide for use in a variety of configurations and systems. The film of transparent conductive titanium-doped indium oxide may be structured as one or more monolayers. The film of transparent...http://www.google.de/patents/US20070234949?utm_source=gb-gplus-sharePatent US20070234949 - Atomic layer deposited titanium-doped indium oxide films
