On a TFT array substrate, an electrooptic device contains pixel electrodes disposed in an image display region, TFTs which are disposed in a peripheral region at the periphery of the image display region and which form a peripheral circuit, and a protective film formed so as to cover at least a part...http://www.google.de/patents/US7202927?utm_source=gb-gplus-sharePatent US7202927 - Electrooptic device comprising a silicon nitride film formed directly on the data lines and not existent on a side face of contact holes
