A system and method of compensating for image smear that arises when imaging onto a moving workpiece with a single pulse of radiation. The system includes a mask frame capable of supporting a mask to be imaged. The mask frame is operatively connected to a drive unit and is capable of moving in the mask...http://www.google.de/patents/US6556279?utm_source=gb-gplus-sharePatent US6556279 - Motion compensation system and method for lithography
