An exemplary method and apparatus for abating reaction products from a vacuum processing chamber includes a reaction chamber in fluid communication with the vacuum processing chamber, a coil disposed about the reaction chamber, and a power source for supplying RF energy to the coil. The coil creates...http://www.google.de/patents/US6888040?utm_source=gb-gplus-sharePatent US6888040 - Method and apparatus for abatement of reaction products from a vacuum processing chamber
