Disclosed are methods for fabricating a micro-electro-mechanical switch. The switch has a cantilever arm disposed on a substrate that can be moved in orthogonal directions for latching and unlatching. For latching, the cantilever arm is moved back by a comb-drive actuator and then pulled down by electrodes...http://www.google.de/patents/US7653985?utm_source=gb-gplus-sharePatent US7653985 - Method of fabricating an RF MEMS switch with spring-loaded latching mechanism
