Methods and apparatus for controllably dispensing fluids within wafer track modules using rotatable liquid dispense arms and nozzles. The fluid dispense apparatus may be specifically selected for developing a photoresist-coated substrate. A series of one or more rotatable arms can be mounted adjacent...http://www.google.de/patents/US6770424?utm_source=gb-gplus-sharePatent US6770424 - Wafer track apparatus and methods for dispensing fluids with rotatable dispense arms
