A storage cell capacitor and a method for forming the storage cell capacitor having a storage node electrode including a barrier layer interposed between a conductive plug and an oxidation resistant layer. A layer of titanium silicide is fabricated to lie between the conductive plug and the oxidation...http://www.google.de/patents/US20030155604?utm_source=gb-gplus-sharePatent US20030155604 - Capacitor compatible with high dielectric constant materials having a low contact resistance layer and the method for forming same
