A confocal wafer inspection system including: (a) a table to carry a wafer for inspection, the table having two vertical degrees of freedom to enable XY axis movements; (b) a movement device for moving the table along the degrees of freedom; (c) a confocal height measurement system, perpendicular to...http://www.google.de/patents/US6934019?utm_source=gb-gplus-sharePatent US6934019 - Confocal wafer-inspection system
