A displacement element including a substrate having electrodes and a cantilever provided on the substrate, wherein the cantilever is formed from a semiconductor material and has at least two electrostatic driving electrodes formed by diffusing an impurity into a semiconductor material....http://www.google.de/patents/US5396066?utm_source=gb-gplus-sharePatent US5396066 - Displacement element, cantilever probe and information processing apparatus using cantilever probe
