Self-shadowed microelectromechanical structures such as self-shadowed bond pads, fuses and compliant members and a method of fabricating self-shadowing microelectromechanical structures that anticipate and accommodate blanket metalization process steps are disclosed. In one embodiment, a self-shadowed...http://www.google.de/patents/US6824278?utm_source=gb-gplus-sharePatent US6824278 - Self-shadowing MEM structures
