An apparatus for producing a planar plasma in a low pressure process gas includes a chamber and an external planar coil. Radiofrequency resonant current is induced in the planar coil which in turn produces a planar magnetic field within the exclosure. The magnetic field causes circulating flux of electrons...http://www.google.de/patents/US4948458?utm_source=gb-gplus-sharePatent US4948458 - Method and apparatus for producing magnetically-coupled planar plasma
