A spatial light modulator may include a plurality of deflectable modulating elements. Each of the deflectable modulating elements may further include a support structure, an electrostatically deflectable mirror element and at least one electrode. The mirror element may be set to a deflection state by...http://www.google.de/patents/US7369291?utm_source=gb-gplus-sharePatent US7369291 - SLM addressing methods and apparatuses
