A microelectromechanical (MEMS) device is presented which comprises a metallized semiconductor. The metallized semiconductor can be used for conductor applications because of its low resistivity, and for transistor applications because of its semiconductor properties. In addition, the metallized semiconductor...http://www.google.de/patents/US7369292?utm_source=gb-gplus-sharePatent US7369292 - Electrode and interconnect materials for MEMS devices
