In a method for producing a membrane for a device, e.g. a microphone, first, a substrate is provided, whereon a counter electrode is disposed. A sacrificial layer is provided on a surface of the counter electrode facing away from the substrate. The surface of the sacrificial layer facing away from the...http://www.google.de/patents/US7502482?utm_source=gb-gplus-sharePatent US7502482 - Membrane and method for the production of the same
