Microelectronic workpiece transfer devices and methods for using such transfer devices. One embodiment of a transfer device includes a transport unit configured to move along a linear track and a lift assembly carried by the transport unit. The transfer device can also include an arm assembly having...http://www.google.de/patents/US6749391?utm_source=gb-gplus-sharePatent US6749391 - Microelectronic workpiece transfer devices and methods of using such devices in the processing of microelectronic workpieces
