The method of forming a carbon layer by vapor phase deposition starts a film deposition process of the carbon layer after a surface to be coated with the carbon layer is heated while adjusting a partial pressure of moisture in a film deposition system of the carbon layer to 5.times.10.sup.-6 Torr or...http://www.google.de/patents/US6316054?utm_source=gb-gplus-sharePatent US6316054 - Carbon layer forming method
