Disclosed herein are exemplary embodiments of a contact system (referred to as a “Z-block”) for interfacing a semiconductor wafer to an electrical tester, and methods for making the same. In a preferred embodiment, the Z-block comprises three stacked pieces or layers: an upper and lower piece which...http://www.google.de/patents/US7176702?utm_source=gb-gplus-sharePatent US7176702 - Contact system for wafer level testing
