A magnetic drive system for moving a substrate transfer shuttle along a linear path between chambers in a semiconductor fabrication apparatus. A rack with rack magnets is secured to the shuttle, and a rotatable pinion with pinion magnets is positioned adjacent the rack so that the pinion magnets can...http://www.google.de/patents/US6679671?utm_source=gb-gplus-sharePatent US6679671 - Substrate transfer shuttle having a magnetic drive
