A capacitance coupled, transmission line-fed, radio frequency MEMS switch and its fabrication process using photoresist and other low temperature processing steps are described. The achieved switch is disposed in a low cost dielectric housing free of undesired electrical effects on the switch and on...http://www.google.de/patents/US7145213?utm_source=gb-gplus-sharePatent US7145213 - MEMS RF switch integrated process
