The present invention relates to a single-polarizer focused-beam ellipsometer. An ellipsometer according to the present invention includes a light source (210); a beam splitting part (220) for splitting a light generated in the light source (210) into a polarized light; an objective lens (230) for concentrately...http://www.google.de/patents/US8009292?utm_source=gb-gplus-sharePatent US8009292 - Single polarizer focused-beam ellipsometer
