The present invention relates to an apparatus for transferring a plurality of semiconductor wafers from their cassettes to a boat. This apparatus comprises a support body on which the cassettes and the boat are mounted, a lifter for lifting wafers from the cassettes, a handling device for carrying the...http://www.google.de/patents/US5054988?utm_source=gb-gplus-sharePatent US5054988 - Apparatus for transferring semiconductor wafers
