A method for inspection of a sample that includes a first layer having a known reflectance property and a second layer formed over the first layer. The method includes directing radiation toward a surface of the sample and sensing the radiation reflected from the surface so as to generate a reflectance...http://www.google.de/patents/US7130376?utm_source=gb-gplus-sharePatent US7130376 - X-ray reflectometry of thin film layers with enhanced accuracy
