Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous...http://www.google.de/patents/US7180586?utm_source=gb-gplus-sharePatent US7180586 - System for detection of wafer defects
