A nozzle plate in which a nozzle through which fluid can pass is formed is prepared, and an insulator layer is located in a layer on the nozzle plate except a location of the nozzle. An electrode plate is provided so as to cover the insulator layer, and a valve beam made of a conductive substance is...http://www.google.de/patents/US4821999?utm_source=gb-gplus-sharePatent US4821999 - Valve element and process of producing the same
