A system and method for detecting a fault and identifying a remedy for the fault in real-time in a semiconductor product manufacturing facility are provided. In one example, the method includes importing data from a manufacturing device and data representing a plurality of different manufacturing devices...http://www.google.de/patents/US20050251276?utm_source=gb-gplus-sharePatent US20050251276 - SYSTEM AND METHOD FOR REAL-TIME FAULT DETECTION, CLASSIFICATION, AND CORRECTION IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT
