An ion beam processing apparatus which processes specimens held by a specimen holder in a vacuum vessel by irradiating the specimen with an ion beam. The apparatus includes a raising/lowering device for raising and lowering the specimen holder. When replacing the processed specimen by an unprocessed...http://www.google.de/patents/US5247181?utm_source=gb-gplus-sharePatent US5247181 - Ion beam processing apparatus and specimen replacing method for the same
