A semiconductor component comprises a substrate (101), a two flexible pressure sensor diaphragms (106, 303) supported by the substrate (101), and a fixed electrode (203) between the two diaphragms (106, 303). The two diaphragms (106, 303) and the fixed electrode (203) are electrodes of two differential...http://www.google.de/patents/US6426239?utm_source=gb-gplus-sharePatent US6426239 - Method of manufacturing a semiconductor component having a fixed electrode between two flexible diaphragms
