A maskless lithography system that writes patterns on an object. The system can include an illumination system, the object, spatial light modulators (SLMs), and a controller. The SLMs can pattern light from the illumination system before the object receives the light. The SLMs can include a leading set...http://www.google.de/patents/US7403266?utm_source=gb-gplus-sharePatent US7403266 - Maskless lithography systems and methods utilizing spatial light modulator arrays
