The object of the present invention is to miniaturize the area occupied by the element and to integrate a plenty of elements in a limited area so that the sensor element can have higher output and smaller size. In the present invention, higher output and miniaturization are achieved by uniting a sensor...http://www.google.de/patents/US20050167573?utm_source=gb-gplus-sharePatent US20050167573 - Semiconductor device and manufacturing method thereof
