A mass microsensor is fabricated with a microcantilever oscillated by a piezoelectric transducer. A chemical coating having absorptive or adsorptive affinity for a specifically targeted chemical or compound is applied to the microcantilever for oscillation in the monitored atmosphere. Molecules of the...http://www.google.de/patents/US5445008?utm_source=gb-gplus-sharePatent US5445008 - Microbar sensor
