Microelectromechanical RF and microwave frequency power limiter and electrostatic protection devices for use in high-speed circuits are presented. The devices utilize an airbridge or a cantilever arm including a contact pad positioned operatively adjacent to an electrically conductive and substantially...http://www.google.de/patents/US6847266?utm_source=gb-gplus-sharePatent US6847266 - Microelectromechanical RF and microwave frequency power regulator
