A tile used to hold one or more probes for testing a semiconductor wafer. The tile has one or more sites for inserting one or more probes to test the semiconductor wafer. Each site has one or more holes. Each hole is coupled with a slot forming an angle. A probe is inserted into the tile from a top of...http://www.google.de/patents/US6586954?utm_source=gb-gplus-sharePatent US6586954 - Probe tile for probing semiconductor wafer
