An inspection probe which allows a plurality of such inspection probes to be arranged at a remarkably reduced pitch. The inspection probe comprises a very thin metal wire having a diameter of 120 .mu.m or less and so shaped as to have self resiliency, and a plated noble metal layer formed on a surface...http://www.google.de/patents/US5151653?utm_source=gb-gplus-sharePatent US5151653 - Inspection probe having thin metal wires with self resiliency