A TFT is manufactured using at least five photomasks in a conventional liquid crystal display device, and therefore the manufacturing cost is high. By performing the formation of the pixel electrode, the source region and the drain region by using three photomasks in three photolithography steps, a liquid...http://www.google.de/patents/US20050221542?utm_source=gb-gplus-sharePatent US20050221542 - Semiconductor device and manufacturing method thereof
