A load sensor includes a substrate, a glass layer provided on the substrate, a wiring provided on the glass layer, an adjusting layer provided on the glass layer, and a strain-sensitive resistor element provided on the adjusting layer and connected to the wiring. A thermal expansion coefficient of the...http://www.google.de/patents/US7397340?utm_source=gb-gplus-sharePatent US7397340 - Load sensor and its manufacturing method
