A method for making a non-volatile memory cell having a select gate, a floating gate and a control gate of the completely self-aligned type, partially self-aligned type and non-aligned type is disclosed. Further, each of the three types of cells has a floating gate, whose linear dimension can be increased...http://www.google.de/patents/US6232185?utm_source=gb-gplus-sharePatent US6232185 - Method of making a floating gate memory cell
