A fabrication process for a thin film transistor including, in the first process step, performing semiconductor layer formation processing, crystallization processing, and first gate insulator formation processing without exposing the substrate to atmosphere. In the second process step, performing rapid...http://www.google.de/patents/US20020192885?utm_source=gb-gplus-sharePatent US20020192885 - Fabrication process for thin film transistors in a display or electronic device
