A method of making an electron permeable window is provided which entails depositing a thin film of an inert, high strength material or compound having a low atomic number onto a substrate by chemical vapor deposition (CVD). Following that deposition, a window pattern and window support perimeter are...http://www.google.de/patents/US4468282?utm_source=gb-gplus-sharePatent US4468282 - Method of making an electron beam window
