There are disclosed TFTs that have excellent characteristics and can be fabricated with a high yield. The TFTs are fabricated, using an active layer crystallized by making use of nickel. Gate electrodes are comprising tantalum. Phosphorus is introduced into source/drain regions. Then, a heat treatment...http://www.google.de/patents/US7371667?utm_source=gb-gplus-sharePatent US7371667 - Semiconductor device and method of fabricating same
