A modulator for modulating incident rays of light, the modulator comprising a plurality of equally spaced apart beam elements, each of which includes a light reflective planar surface. The elements are arranged parallel to each other with their light reflective surfaces parallel to each other. The modulator...http://www.google.de/patents/US5459610?utm_source=gb-gplus-sharePatent US5459610 - Deformable grating apparatus for modulating a light beam and including means for obviating stiction between grating elements and underlying substrate
