A shielded probe apparatus is provided with a shielded probe and a tri-axial cable that are electrically connected within a shielded chassis. The shielded probe apparatus is capable of electrically testing a semiconductor device at a sub 100 fA operating current and an operating temperature up to 300...http://www.google.de/patents/US6992495?utm_source=gb-gplus-sharePatent US6992495 - Shielded probe apparatus for probing semiconductor wafer
